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Spectroscopic ellipsometry technology has extensive applications in semiconductor metrology. Compared with spectroscopic ellipsometry, the Mueller matrix ellipsometry can acquire more useful information about the sample. In this paper, we present the construction of Mueller measurement equipment for 300 mm integrated circuit production line application and demonstrate the abilities of the equipment...
The upconversion photoluminescence of Ho3+ ion sensitized by Yb3+ ion in Ho3+/Yb3+codoped Gd2O3 nanocrystals with and without Li+ is investigated in this paper. Strong fluorescence in the green (534–570 nm) and red (635–674 nm) regions of the spectrum has been observed, arising from the 5F4/5S2 → 5I8 and 5F5 → 5I8 transitions of Ho3+ ion, respectively. Yb3+ ion is considered to be a better sensitizer...
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