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It is well known that temperature variation affects a MEMS device's performance. In this paper, the effect of temperature on the whole MEMS based gyroscope is observed by recording and analysis the zero rate output (ZRO). The effect of temperature on the ZRO comes from material parameter changing and electronic parameter changing. With temperature changing, the ZRO of the gyroscope suffers from changes...
In this paper, we demonstrate TaN/fluorinated HfO2 CMOS devices, focusing on symmetry and asymmetry fluorine incorporation at top or bottom HfO2 interfaces. 16% permittivity enhancement, 65% and 91% mobility increases for electron and hole, respectively, under high electric field was achieved. Reliability of n- and p-MOSFET was improved 3 orders and 8% for GIDL and hot carrier immunity, respectively...
Optical fiber communication has become mainstream in wired communication due to its low attenuation, low cost, and high bandwidth. However, optical fiber is light and thin, which makes the coupling procedure between fibers and optoelectronic components very complex and difficult. To maintain high transmission quality, it is imperative to develop a high-precision alignment technique for optical fiber...
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