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The sensor for detection of ethanol vapours using RF sputter deposited ITO thin film on glass and Si substrates is reported. The principle of operation is the change of resistance of ITO film on exposure to ethanol vapours. The films were annealed at 450°C for 1h in air. The films were extensively characterized for their structural properties using XRD, SEM and TEM measurements. The sensing area was...
Zinc oxide (ZnO) thin films were grown on silicon substrate by RF (radio frequency) magnetron sputtering. Surface topography of these films exhibited a nanostructured granular appearance with the size of individual grains between 50 to 100 nm. Corresponding cross-sectional electron micrographs revealed columnar grains in the form of aggregated nanorods/wires with length of about 500 nm, similar to...
This paper reports the design and fabrication of a membrane-supported spurline band-stop filter. The filter was fabricated using silicon bulk micromachining technique and a CMOS compatible metal/dielectric deposition RF sputtering technique. A closed-form expression of an equivalent value of dielectric constant is also derived and introduced to account for a multi-layer dielectric stack formed as...
In this paper, we report the design and fabrication of high performance Ka-band inset- fed micromachined patch antenna using post- CMOS compatible process technology. The main emphasis of this paper is to demonstrate use of RF sputtering as potential metal-dielectric films deposition-process for rapid prototyping of many antenna structures in the absence of access to a well- established MEMS foundry...
In this work, we report fabrication of completely planar microstructures for MEMS using RF sputtered ZnO as a new sacrificial material in surface micromachining process. The microstructures fabricated by conventional surface micromachined process have two bends at the anchor point. These have been eliminated using a new modified process, which results in completely planar microstructures. For this...
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