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Results of the design, microfabrication and testing of a proof-of-concept, diaphragm-type silicone sealing joint are presented. DRIE-etched cavities were filled with a flexible sealing element made of polydimethylsiloxane that supports a silicon piston. A series of sealing joints were produced with variable widths, and the displacement of the piston was measured after applying pressures of up to 1 bar...
Results of the design, fabrication and testing of a proof-of-concept, microfabricated, diaphragm-type silicone sealing joint are presented. DRIE-etched cavities are filled with a flexible sealing element made of PDMS that support a silicon piston. A series of sealing joints are produced with variable widths, and the displacement of the piston is measured after applying pressure of up to 2 bar in 0...
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