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We demonstrate high-performance silicon-nanowire gate-all-around MOSFETs (GAA SNWFETs) fabricated on bulk Si by a novel top-down complementary MOS-compatible method. The fabricated n- and p-type GAA SNWFETs of 50-nm gate length and of 6-nm diameter show superior device performance, i.e., driving capability of ...
We demonstrate high performance silicon nanowire gate-all-around MOSFETs (SNWFETs) fabricated on bulk Si by a novel top-down CMOS-compatible method. The fabricated N- and P-type SNWFETs of sub-50 nm gate length and of ∼5 nm in diameter show excellent short channel effects (SCEs) immunity with subthreshold slope (SS) of 90/69 mV/dec, DIBL of 47/10 mV/V, and high driving current of 2×103/5.4×103 µA/µm...
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