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A MEMS electret generator for energy harvesting applications has been developed and its performance is examined in a series of experiments. In addition, an autonomous wireless sensor powered by the electret generator combined with a microwave wireless power transmission is proposed for the space transmission system.
Mechanical response of high-thermally-stable-grade parylene (diX-SR/HR) is investigated for flexible spring applications. Pendulum structures with a high-aspect-ratio beam are microfabricated using different parylene materials, and their amplitude and stress at resonant oscillation are measured. Based on fatigue tests and measurements of the temperature coefficient of Young's modulus, MEMS structures...
A vibration-driven electret generator has been developed for energy harvesting applications. By using parylene as the spring material, a low-resonant-frequency MEMS generator is realized. Electrostatic levitation is adopted for the gap control. Large in-plane amplitude of 0.5 mm at the resonant frequency as low as 21 Hz has been achieved. We also demonstrate electret-powered operation of LED using...
A vibration-driven electret generator has been developed for energy harvesting applications. Perfluorinated polymer electret with extremely-high surface charge density is employed for large power output. By using parylene as the spring material, a low-resonant-frequency MEMS generator is realized. Large in-plane amplitude of 0.8 mm at the resonant frequency as low as 37 Hz has been achieved. With...
Vibration-driven electret generator has been developed with the aid of MEMS technologies. Parylene high-aspect-ratio spring is successfully microfabricated to support an in-plane seismic mass. Resonant frequency as low as 37Hz has been achieved with a large in-plane amplitude of 1 mm. With our early prototype, we have obtained 21 Vp-p voltage output.
We have developed a new electrostatic actuator consisting of multilevel structure, which can move in a long distance with no need of a high driving voltage. This actuator features to have a built-in upward-deflection. We have also developed a variable capacitor, which can be controlled with a capacitance ratio (C/R) higher than 10 using a new configuration of the actuators and capacitor plates. The...
In this paper, we propose a novel variable capacitor having higher capacitance ratio (C/R) >35 than ever before. So far, various types of RF-MEMS variable capacitors have been proposed, but even the highest C/R among the capacitors under development is now the order of 4. For enabling the multi-band of the wireless terminal, it has been expected to achieve a device having higher C/R. We demonstrate...
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