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This paper introduces methods to find the design parameters that result in the best sensitivity for a given in-plane differential capacitive accelerometer. We show how to find the optimum electrode length for a device of a specific design area. Design and simulation results for a CMOS-compatible single-axis silicon carbide accelerometer are reported, based on the methods proposed here. The accelerometer...
This paper introduces a novel dual-axis accelerometer structure with low cross-sensitivity. The device is fabricated in an SOI process, namely SOIMUMPs, and its fabrication is finalized by an in-house release step. The device measures 1 × 1 mm2 with four proof masses that are able to sense accelerations in the X and Y axes independently. Two commercial capacitance-to-digital converters are used to...
This paper introduces a novel dual-axis accelerometer structure with low cross-sensitivity. Devices are designed to be fabricated in the SOIMUMPs process, followed by an in-house release step. The device measures 1 mm × 1 mm with 4 proof masses that are able to sense accelerations in the X and Y axes independently. Simulations show a sensitivity of 25 fF/g with a maximum alignment error of 1.6°. The...
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