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This paper introduces a device that can be applied to the trapping and analysis of nanoparticles in fluids. The device is fabricated on silicon substrates using standard microfabrication techniques. Sacrificial etching is used to form nanofluidic channels of precise dimensions. A section over these channels is made deformable by thinning the SiO2 overcoat, and an electrode over the deformable section...
An array of parallel planar nanochannels containing two or three segments with varying inner heights was fabricated and used for size fractionation of inorganic and biological nanoparticles. A liquid suspension of the particles was simply drawn through the nanochannels via capillary action. Using fluorescently labeled 30nm polyacrylonitrile beads, different trapping behaviors were compared using nanochannels...
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