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This paper focuses on packaging and miniaturization of ozone sensors and review aspects of their heterointegration together with other physical sensors for consumer electronics (CE) and internet of things (IoT) applications. We present a concept and simulations of an optically regenerated gas sensor for ozone detection [1]. A demonstrator of innovative stand-alone miniaturized gas sensor according...
A miniaturized ozone gas sensor working with UV-light was investigated and aspects of its heterointegration were reviewed, simulated and analyzed. We analyzed possible interactions of the integration of functional optical elements together with MEMS-based physical sensors. Gas diffusion into the package and light propagation inside the package were simulated amongst well-known simulations such as...
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