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This paper provides fundamental and engineering design principals of integrated microthrusters and microthruster arrays. The microsystems fabrication, synthesis of nanoenergetic propellants, system integration and other problems are addressed and solved. The motion and solid-state sensors can be integrated to measure physical quantities. Sensor data fusion, data acquisition, logics, control and other...
The proposed MEMS-technology viscosity sensor solves two major drawbacks associated with current state of the art MEMS viscosity sensors, such as: (1) Functional complexity and integration of external components for actuation and subsequent data acquisition; (2) Fabrication incompatibilities with CMOS processes. The proposed solution is based on thermally induced actuation, subsequent vibrations of...
We document transformative research, practical engineering solutions and enabling sensing technologies. Microsystems integrate nanotechnology, microelectronics and micromachining. Micro-electromechanical systems (MEMS) are used in various applications. In aerospace, automotive, energy, manufacturing, medical, naval and other systems, autonomous MEMS measure physical quantities, process the data, transmit...
Solid propellants are used in various flight and underwater systems as well as in propulsion platforms. Micromachining, microelectromechanical systems (MEMS) and automatic dispensing of high-energy-density nanoenergetic materials are examined for current and next generation of application-specific flight and underwater platforms. The integrated MEMS-technology microthrusters with the optimized-by-design...
We report scholarship and learning activities in Rochester Institute of Technology (RIT) in areas of micro-electromechanical systems (MEMS) and nanotechnology. Microsystems may integrate microelectronics, nano and MEMS technologies and solutions. To enable integrated transformative scholarship and learning, fundamental and applied research is conducted at the state-of-the-art Microsystems Fabrication...
Rochester Institute of Technology's EMCR870 - Microelectromechanical Systems course is a unique course in which we use an accelerated schedule to design, fabricate, package and test MEMS devices designed by the students. This is a goal-oriented class and lab as opposed to the more typical structured class. Real-life situations are mimicked in which limited resources force the students to make timely...
This paper reports the developments of modular courses and curricula in nano- and microelectromechanical systems (MEMS). We design a Nano Science, Engineering and Technology (NanoSET) course as well as MEMS curriculum. The MEMS curriculum consists of three courses, e.g., MEMS Design, MEMS Fabrication and MEMS Evaluation. The role and implication of quantum mechanics, nanotechnology, microscopic systems,...
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