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This study reports a 4×1 parylene micropipette array for locally and selectively functionalizing the surface of a CMOS-based hall sensor array with different capture antibodies. The proposed device is the key to enable simultaneously detecting different target analytes in a sample solution on a SoC chip. The proposed parylene micropipette array was fabricated by using the embedded parylene channel...
In this work, a highly-sensitive tactile sensor array using the tunneling piezoresistive effect is presented. The sensing element, which is made of multi-wall carbon nanotubes and polydimethylsiloxane (MWCNT and PDMS) conductive polymer, was patterned with microdome structures by a novel fabrication process on a membrane filter substrate. The fabricated sensing device features advantages such as ultra-high...
This study reports a paper-like micro-supercapacitor (SC) with in-plane interdigital buckypaper electrodes on a filter membrane substrate. A vacuum filtration method assisted by lithography techniques is proposed for patterning buckypaper. The proposed micro-SC features advantages including a flexible structure, simple fabrication, easy chip integration, and high specific capacitance. Increasing the...
This work presents a capacitive immunosensor using on-chip electrolytic pumping and magnetic washing techniques. The proposed device possesses the advantages such as simple operation, low power consumption, and portability. The proposed device was fabricated using typical micromachining process, and is suitable for mass-production. We also demonstrated the detection of N-Terminal pro-brain-Type natriuretic...
In this work, we present a flexible tactile and shear sensing array utilizing patterned buckypaper as the sensing elements. A novel fabrication process for patterning buckypaper with high aspect ratio was proposed. The fabricated sensing device possesses the advantages such as anisotropic sensing capability, flexibility, simple fabrication, and low cost. The measured resistance vs. applied shear force...
This paper presents the development of a 2×2 optical switch which consists of a MEMS-based silicon micro-mirror structure and two bi-stable solenoid-based actuators. The silicon micro-mirror structure is realized by using a proposed simple single-step anisotropic silicon etching process. Bi-stable solenoid-based actuators are designed and developed. The proposed device, which adapts the split-cross...
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