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Manufacturing has brought increased semiconductor device functionality through smaller geometries, larger wafer sizes, and faster operating speeds, as well as increased disk drive storage density and display sizes. To produce these advanced technologies the use of air ionization for static control has changed. This paper explores new ionization requirements and methods.
A handler simulator with a 50-ohm current detector creates CDM events for analysis and circuit modeling. The 50 ohms is mathematically removed to leave only air spark resistance, and the synthesized waveform, with higher peak current, is shown to relate to both CDM tester results and E-field in the factory.
There are no standards for establishing equipment capability to handle devices of known ESD sensitivity. Prior papers established that voltages on components correlate to CDM test voltages. But current in the discharge damages devices, not the voltage. This paper describes a procedure and test fixture for discharge current measurements in equipment to compare with discharges of CDM testing.
In Flat Panel Display (FPD) manufacturing, automated handling charges both sides of the glass panels. Conventional ionization technology has a limited effect for ESD and particle contamination control as most of the ionizing bars are put over the top of the glass panels. But the glass has also been charged on the bottom of the panel, and as the glass gets bigger and panel transportation speeds increase,...
There are no standards for establishing the capability of equipment or a process to handle devices of known ESD sensitivity. A prior paper established that voltages measured on a device pin could correlate to device testing voltages. This paper makes measurements on different devices and people to compare with voltages and discharges of CDM and HBM testing.
Corona air ionization is widely used for neutralization of electrostatic charges in a broad variety of applications. In order to control and maintain the neutralization process, corona air ionizers are often available with external feedback mechanisms that provide information about the ionizer status and the quality of the created volumetric ion field. Sensors are utilized to detect the presence of...
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