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This paper reports an airflow shear stress sensor whose sensitivity is enhanced by modifying the surface roughness. The sensor consists of a cantilever-typed shear stress sensor and a micro pillar array on the surface of the cantilever. Piezoresistors are formed on the side walls of the cantilever's hinges to detect the shear force acting on the cantilever. When a shear airflow is applied to the proposed...
This paper reports a measurement method of vacuum pressure from 10−1 to 103 Pa with a piezoresistive cantilever-based differential pressure sensor (DPS). The gap around the cantilever of the DPS was narrow (2 μm) so that the air flow through it was suppressed. The through-hole beneath the sensor is connected to a chamber which is filled with saturated vapor. This method allows the pressure of the...
This paper reports a three-axis force sensor that can measure cellular forces in real time with high sensitivity. The sensor features a photoresist micropillar fabricated on a flexible cross-shaped Si structure. The three dimensional forces acting on the micropillar can be detected from the resistance changes of three piezoresistors designed on the Si structure. Due to the flexibility of the Si beams,...
We propose a highly sensitive three-dimensional tactile sensor using the structure of elastic micro pyramids pressing on piezoresistive cantilevers. In the structure of the sensor we proposed, the forces acting on the surface of the elastomer were transmitted to the cantilevers through the pyramids. The key point of our sensor was that the cantilevers were not completely embedded inside the elastomer:...
We propose a highly sensitive pressure sensor using an elastic micro pyramid array with a gold-coated surface pressing on a resistive silicon beam. When a pressure was applied on the pyramid array, the deformation of each pyramid induced the larger contact area between each pyramid and the resistor. Since the pyramid array was coated by a gold layer, which had much lower resistivity than that of the...
We propose a method to fabricate three dimensional microfluidic channel systems with spincoated micrometer-thin elastomer multilayer. We use the molecular diffusion of thin elastomer layers to our advantage and propose a microfluidic fabrication process free of molding and bonding steps. We achieved various expandable three dimensional multilayer channel designs that can have interesting applications.
We propose a micro suction cup array for adhesion to both dry and wet surfaces. We measured the peel-off forces of a PDMS micro suction cup array, a PDMS flat-tip micro structure array and a flat PDMS pad from both wet and dry glass surfaces. When the glass surface was wet, the peel-off forces of a PDMS flat-tip micro pattern and a flat PDMS pad decreased by more than 1.7 times and 7.0 times, respectively...
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