The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
As double patterning techniques mature, they become the primary approaches enabling feature size scaling beyond 32nm. Although it is possible to print dense patterns by splitting the design into two masks, printability problems and pattern distortion remains a major concern. In this paper, we study the potential lithographic hotspots that may occur between the line ends in one-dimensional gridded...
Machine learning techniques have recently been applied to the problem of lithographic hotspot detection. It is widely believed that they are capable of identifying hotspot patterns unknown to the trained model. The quality of a machine learning method is conventionally measured by the accuracy rates determined from experiments employing random partitioning of benchmark samples into training and testing...
Printability of layout objects becomes increasingly dependent on neighboring shapes within a larger and larger context window. In this paper, we propose a two-level hotspot pattern classification methodology that examines both central and peripheral patterns. Accuracy and runtime enhancement techniques are proposed, making our detection methodology robust and efficient as a fast physical verification...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.