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We have succeeded in enhancing the piezoelectric property of lead zirconate titanate (PZT) thin films by employing “pulse poling” technique. We have fabricated MEMS-based microcantilevers using Pb(Zr0.52,Ti0.48)O3 (MPB-PZT) thin films. By applying 1 kHz and 100 V of unipolar triangle pulse voltage, the transverse piezoelectric constant −d31 of the PZT thin film has been enhanced as high as 105 pm/V,...
Concerning an electrical breakdown of a high-temperature gas, theoretical calculations were carried out to obtain a sparking voltage from an ionization coefficient on the basis of the Townsend breakdown theory. The calculations were made for a nitrogen gas with a mass-density of 1.14 kg/m3 under a constant volume, in consideration of a dissociation and an ionization reactions of N2. The calculation...
The present study describes the MEMS-based piezoelectric switch to activate the event-driven wireless sensor node for chicken health monitoring system. We have fabricated the switch composed of “S” shaped piezoelectric cantilever and proof mass, where the resonance is 24 Hz. When the switch has been vibrated at 4, 6, 8, and 12 Hz, which is close to the chicken movement frequency, the input vibration...
A gold coated silicon mirror (5mm × 5mm) actuated by 1×10 piezoelectric Pb(Zr, Ti)O3 (PZT) array actuator integrated on a cantilever beam has been demonstrated for variable optical attenuator (VOA) application. Torsional attenuation based on the difference in the dc biasing voltage applied to the 1×10 PZT array actuator was investigated. The dynamic attenuation range of 40dB at 1.8V DC bias is observed...
We have developed the digital output piezoelectric accelerometer using CMOS-compatible AlN thin films. The AlN thin films were deposited by sputtering. The multilayer of Pt/Ti/AlN/Pt/Ti/SiO2 has been fabricated into the piezoelectric accelerometers, where the patterned AlN thin films are arrayed in parallel and electrically connected in series. The sensitivity of the fabricated accelerometer reaches...
We propose a digital output piezoelectric accelerometer for chicken health monitoring. The accelerometer has patterned Pb(Zr, Ti)O3 (PZT) thin films electrically acc connected in series, which accompany CMOS switches. The elerometer converts acceleration into number of on-state CMOS switches, which can be called as "digital output". Since the accelerometer are based on piezoelectric effect,...
To investigate possibility of the space charge measurement in the tape with a drug for percutaneous absorption and possibility of the control in space charge movement that might be corresponding to the drug movement by the external signal, the space charge was measured in the tape added a drug for percutaneous absorption. The positive space charge caused by addition a drug was accumulated in the sample...
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