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Design and implementation of a micro scanning mirror for the application of WVGA resolution (848×480) pico-projector display is presently reported. A FEM model for damping coefficient analysis is built and shows a good agreement with experiment result. In addition, stress study for the torsional bar is performed to deal with fracture issue. With the consideration on damping coefficient and stress...
The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs with and without comb offset, a novel asymmetric mirror plate was designed to introduce an imbalance. It was found that all the three designs can be actuated...
A novel Biased Reptation model with Electroosmosis (BRE) is proposed for long-chain DNA electrophoresis in microchannels with sub-micron pillar array. The BRE model incorporates effective electroosmosis into the classical BRM model. In addition, the electrophoretic mobilities of different sizes of long-chain DNA, T4 DNA and lambda DNA, at different electric fields were measured. In comparison with...
An accurate and effective finite element method (FEM) based model for the MEMS electrostatically actuated 2D resonant scanning mirror is presently reported to analyze and predict the mirror's performance which has highly nonlinearity. The simulated transient responses of the mirror showed good matches with the experimental results. The hysteretic frequency response can also be predicted by the model...
This paper presents a systematic study of DNA electrophoresis in microchannels integrated with sub-micron pillar arrays. Electrophoretic mobility of different DNA fragments in channels having pillars of various dimensions is measured. In addition to confirming a previously observed nonlinear relationship with applied electric field following the Biased Reptation with Fluctuations Model, the mobility...
This paper presents a systematic study of free-solution electrophoretic motion of large DNA molecules in microsystems integrated with sub-micron pillar arrays. A nonlinear dependence of the DNA electrophoretic mobility on the applied electric field is observed. The interaction between DNA molecules and the pillar arrays is inspected under high optical magnification. Several distinct DNA molecular...
A new technology approach for the design, fabrication and application of an integrated free-solution electrophoresis microsystem is presented. The technology approach, which utilizes the dual-photolithography provided from a stepper and a contact aligner, allows fast and flexible formation of sub-micron pillar array patterns on a silicon substrate. Combining with standard microfabrication technique...
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