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We report on the development of a diamond-on-sapphire microelectrode quadrupole array, substituting the commonly used inert metal electrode material by nanocrystalline diamond (NCD). This allows to combine the transparency (desired for fluorescence analysis) with the properties of an inert quasi-metallically doped diamond electrode. The NCD film was nucleated by BEN (Bias Enhanced Nucleation) on double...
Scaling of microjoints in 3-dimensional chip stacks is proposed by means of kinetic control. Therefore, phase growth in the copper/tin system in presence of various metal barriers at the interface is evaluated. Promising results have been obtained by using layers of Ti, Ta, Ti:W or combilayers thereof in a thickness range of 20 to 50 nm. The lack of wetting ability observed in some cases could be...
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