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Wavelength-division multiplexing filters are photonic key components for the distribution of multiple optical channels. Microring and racetrack resonators in add/drop configuration can be employed to perform the signal routing. In this work, low-loss hydrogenated amorphous silicon (a-Si:H) was employed as waveguide core material as it is transparent in the near infrared and can be fabricated at low...
The a-Si:H deposition process is systematically investigated in intrawafer and wafer-to-wafer experiments. Photonic ring resonators were studied within-chip and chip-to-chip, showing ±1.2nm resonance peak variations and deviations of 0.25% (intrachip) and 0.9%(interchip) for group index and FSR.
We report about the fabrication and optical characterization of high Q hydrogenated amorphous silicon microdisk resonators in telecommunication C-band. High resonance peaks of >30dB were achieved. Intrinsic Q-factors of 0.9×106 were measured with >10dB extinction for qTM-modes.
An optic switch of SOI-nanowires with a very low power consumption of less than 1 mW is presented. The nanowires are placed on freestanding electrostatically deflectable SiO2-membranes to tune them thermo-optically and elasto-optically.
Photonic wires, channel and rib waveguides as well as tapers were fabricated with amorphous silicon showing low propagation loss. Material analysis and RTA was carried out in order to tune the refractive index post deposition.
A rib-like spot-size converter was fabricated with a KOH etched shadow mask. The improvement in coupling and an expansion of the spot-size were evaluated with simulations and confirmed by transmission loss measurements.
The elasto-optic and the thermo-optic effect in silicon nanowires is demonstrated using Mach-Zehnder interferometers. The nanowires are placed on undercut SiO2 membranes which can be deflected electrostatically.
In this paper a simple contact lithography with i-line or DUV is used for the production of photonic wires, which are additionally smoothed and shrunk by thermal oxidation.
Three-dimensional taper structures made from plasma-enhanced chemical vapor-deposited hydrogenated amorphous silicon were evaluated by calculating the deposition profiles with a line-of-sight model and the corresponding mode profiles with a full-vectorial mode solver. The tapers were fabricated with shadow-masks made from KOH-etched Si wafers, and with the tapers light was coupled into 500-nm-wide...
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