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The recent increase in transportation costs and the push for cleaner emissions demands advancements in aerospace technology. The current instrumentation used in aerospace applications is costly, and indirect measurement approaches are often employed due to the inability to locate sensors in harsh environments. Health monitoring technologies for the development of a distributed sensor network can be...
An electrodeposition process for embedding NiFe alloys in deep silicon trenches (100 mum) without edge-overgrowth was developed by utilizing dry film photoresist as a sacrificial trench top. The dry film photoresist prevented high concentration of current flux at the trench edges during electrodeposition leading to planar deposition topographies. In addition, the effect of the applied current density...
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