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We present experimental data on resonant behavior of the first flexural mode of a silicon nitride cantilever in noble gas ambients of He, Ar, and Xe. To this aim thermal noise spectra have been measured with an optical setup. Overall resonance frequency and the quality factor of the first flexural mode vs. pressure are in good agreement with the existing theories for the molecular and viscous pressure...
Laser beam deflection is a well known method commonly used in detecting resonance frequencies in atomic force microscopes and in mass/force sensing. The method focuses a laser spot on the surface of cantilevers to be measured, which might change the mechanical properties of the cantilevers and affect the measurement accuracy. In this work we showed that the joule heating of the laser, besides other...
Nanoelectromechanical cantilevers have achieved unprecedented sensitivity in the detection of displacement, mass, force and charge. Although resonating cantilevers are demonstrated to be excellent mass sensors, environmental effects like humidity, ambient gases and contamination result in uncertainty in the calculation of either adsorbed mass or mechanical properties due to shifts in resonance frequencies...
A systematic study of the quality factor and resonance behavior of flexural and torsional modes of silicon nitride cantilevers vs. pressure is presented. Different anchoring, i.e., with and without undercut, is studied in the range between 3 mPa and atmospheric pressure. Thermal noise spectra of the cantilevers have been measured using a home-made optical deflection setup with an appropriately windowed...
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