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This paper presents a novel multi-tip electrospray ionization (ESI) platform design, which has 60 individual ESI tips. The unique feature of the design is that the tips are located at the periphery of a circular platform. The platform is fixed in front of a mass spectrometer (MS), on a computer controlled rotating table. After each MS measurement a new tip is aligned towards the MS by rotating the...
We present a fabrication process for free-standing, nanoperforated membranes which are made of single-crystalline silicon. The membranes are fabricated out of silicon-on-insulator wafers. The mask for nanoperforations is patterned on the device layer side of the wafer using nanoimprint lithography. The membrane is released by etching through the handle wafer and the buried oxide layer from the backside...
We have designed, fabricated and tested a micropillar array electrospray ionization (muPESI) chip for mass spectrometer (MS) analysis of drugs and biomolecules. The chip has a lidless microstructured channel that contains a perfectly ordered array of micropillars. The typical sample volume is 2.5 mul and the sample flow in the channel is spontaneous. The limit of detection for verapamil measured with...
Atomic layer deposition (ALD) of aluminium, zinc and titanium oxides into high aspect ratio electrochemically etched pores is described. Macroporous silicon was fabricated by electrochemical etching. Aspect ratios of 50:1 were routinely obtained. commercial anodisc alumina pores were used for reference. ALD thin films Al2O3, TiO2 and ZnO were deposited in the pores. The results were studied with scanning...
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