The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
We describe a silicon nanowire (SiNW) biosensor fabricated in a fully depleted SOI CMOS process. The sensor array consists of N by N pixel matrix (N 2 pixels or test sites) and 8 input–output (I/O) pins. In each pixel a single crystalline SiNW with 75 by 20nm cross-section area is defined using sidewall transfer lithography in the SOI layer. The key advantage of the design is that each individual...
We present a sidewall transfer lithography (STL) process to fabricate silicon nanowires using the CMOS compatible materials SiO2, SiN and α-Si. The STL process is implemented using a single cluster tool for reactive ion etching (RIE) and plasma enhanced chemical vapor deposition (PECVD) with a maximum process temperature of 400 °C. Using three lithography masks, single and multiple silicon nanowires...
We describe a silicon nanowire (SiNW) biosensor fabricated in a fully depleted SOI CMOS process. The sensor array consists of 32 by 32 pixel matrix (1024 pixels or test sites) and 8 input-output (I/O) pins. In each pixel single crystalline SiNW with 60 by 20 nm cross-section area is defined using sidewall transfer lithography (STL) in the SOI layer. The key advantage of the design is that 1024 individual...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.