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A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-mum PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage...
This paper presents a comparison of the energy harvesting capabilities of 3 different electrostatic mechanisms based on MEMS (microelectromechanical system) structures which are designed and operated in idea vacuum. The 3 mechanisms that will be compared are the in-plane overlap, in-plane gap closing and out-of-plane gap closing mechanisms. Firstly, it was found that the in-plane gap closing mechanism...
A pre-mold cavity package for MEMS application had been successfully demonstrated, with the technology of premold on substrate, modules combining MEMS chips, integrated circuits, passives can easily be fulfilled in either LGA or BGA format. Furthermore, the batch and cost effective transfer molding process could facilitate the low cost package for commercial MEMS application.
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