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This paper presents a MEMS-based 5th-order ΔΣ capacitive accelerometer. The ΔΣ loop is implemented in mixed signal, the global 5th-order filter having a 2nd-order analog and a 3rd-order digital part. The system can be used with a wide range of sensors, because the mixed-signal front-end is programmable. The developed ASIC comprises a voltage-mode preamplifier, two parallel demodulators implementing...
This paper reports on a high performance navigation grade MEMS servo accelerometer targeted at inertial applications. Reported results are for a bulk MEMS capacitive sensor with 11g full scale over a 300 Hz bandwidth interfaced with a highly optimized servo-loop 5th-order sigma-delta electronic. Measurements demonstrate a long-term bias stability of +/-0.2mg, a second order non-linearity K2 < 5...
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