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Nano-porous silicon films have drawn significant attention for the realization of light emitting diodes on silicon substrates. We report a novel low temperature fully radio-frequency plasma hydrogenation assisted process to realize light emitting diodes on glass substrates. Such devices can be of great importance for lighting applications, as an alternative approach for organic LED's or I-V compounds...
The preparation of porous silicon films by DC-plasma hydrogenation and subsequent annealing of amorphous silicon films on silicon and glass substrates is reported for the first time. The effects of varying plasma power and annealing temperatures have been investigated and characterized by scanning-electron microscopy, transmission-electron microscopy, and photoluminescence. A plasma density of about...
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