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We report results from in situ real-time spectroscopic ellipsometry (RT-SE) investigations into the sputter deposition and subsequent annealing behavior of permittivity-engineered transparent conductive oxide (TCO) films. RT-SE reveals information about the growth dynamics and evolution of the films' electro-optical properties during deposition. We investigate the correlations of the ex situ optical...
SF6 was investigated as an alternative F source for preparing fluorine doped tin oxide films (SnO2:F). SnO2:F films were prepared on glass by low pressure MOCVD using tetramethyltin (Sn(CH3)4) and O2 with SF6 between 500??C and 650??C and 10-65 mol% SF6. These were compared to un-doped SnO2 and SnO2:F grown with CBrF3. SF6 required higher thermal activation than CBrF3. High electron mobility (~40...
A comparison between research-grade, tin-oxide (SnO2) thin films and those available from commercial sources is performed. The research-grade SnO2 film is fabricated at NREL by low-pressure metal-organic chemical vapor deposition. The commercial SnO2 films are Pilkington Tec 8 and Tec 15 fabricated by atmospheric-pressure chemical vapor deposition. Optical, structural, and compositional analyses are...
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