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This paper presents the dynamic behavior of a piezoelectric MEMS actuator using finite element simulations taking anisotropic properties of silicon chip and technologically induced stress into account. Silicon anisotropy has shown to shift eigenfrequencies particularly in higher eigenmodes compared to that of isotropic case. Technologically induced stress has resulted in substantial influence on both...
We developed a batch-fabrication of nanoscale-tip silicon microprobe arrays for use in multipoint nanoscale investigations of cell/neuron in-vivo/in-vitro. Sharpened tips, less than 100nm diameter, can be formed at the tips of out-of-plane three-dimensional silicon microprobe (length >10mum) arrays, by silicon wet etching-based batch-process within only 1-3min, providing precisely controlled tip...
We have investigated numerically the optimization of newly designed Pb(Zr,Ti)O3 (PZT) actuated segmented μ-mirror device used particularly in bio-medical application for adaptive optics. By performing advanced finite element modeling that includes thermo-mechanical and piezoelectric simulations an optimal μ-mirror device design is suggested maintaining its structural integrity intact.
A piezoelectric ultrasonic hydrophone array was fabricated using diaphragm transducer on Si substrates. A two dimensional (2-D) array of 8 times 8 elements with diaphragm transducer has been developed by XeF2 etching from the topside of Si. In this paper, we describe the fabrication process of the diaphragm transducer array. A finite-element analysis (FEA) was calculated to evaluate the resonant frequency...
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