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Thermal impact on back-end interconnects resulted from self-heating (SH) effect in FinFET devices is investigated here. The self-heating effect in FinFET devices will generate more heat in fin structures than planar devices and influence the reliability of interconnects. In this study, testing structures including metal sensors of different metal layers are designed, fabricated and measured, as well...
With technology rapidly advance, the energy of demand is also with the greatly increased. Therefore, the development of new energy or energy harvesting attracts much attention. Our group has proposed an innovated micro heat pipe harvester based on the micro-piezoelectric vibration-induced power device. The deformation of the piezoelectric material by vapors impacting enables it to convert the vapor...
This work presents the methodology to synthesize single-walled carbon nanotubes and place them directly on paper utilizing a micro chemical vapor deposition (μCVD) system. In contrast to conventional CNTs (carbon nanotubes) synthesis in high temperature furnaces, the technique of μCVD with localized heating provides the foundation for the direct growth of CNTs on paper. Experimentally, self-aligned...
Adequate ESD protection is a new design challenge for HV electronics. This paper presents design, failure analysis and optimization of a HVggLDMOS ESD protection structure in a HV BCD process. Theoretical analysis involving Kirk effect and mixed-mode ESD simulation-design technique were used to analyze experimental results and to optimize the HV ESD protection structure.
The traditional glass drilling using mechanical processing and laser processing in air would produce many kinds of defects such as bugle, debris, crack and scorch. In this paper, we have applied the method of liquid-assisted laser processing (LALP) to reduce the temperature gradient, heat-affect zone region for achieving crack-free glass drilling. At the parameters of laser power 6 W, scanning speed...
The conventional chemical vapor deposition system has been miniaturized to the micro scale, leading to several potential advantages for the synthesis of nanostructures. First, minute heat capacity leads to fast temperature stabilization. Second, tiny chamber volume helps for rapid gas species exchanges. Third, small Reynolds number ensures laminar flow for better control of deposition sources. Forth,...
In this paper, the development of a portable polymerase chain reaction (PCR) device is presented. The fully integrated self-contained system consists of four major parts: a disposable chamber chip with micro-channels and pumping membranes, a heater chip with micro-heaters and temperature sensors, a linear array of electromagnetic actuators, and a control/sensing circuit. The system can be fully operated...
A localized synthesis and self-assembly process for ZnO nanowires has been demonstrated using "on-chip local vapor transport." These single-crystal ZnO nanowires of 50-60 nm in average diameter are grown by the solid-source inductive heating method in a room temperature chamber. Nanowires are connected between two suspended MEMS microstructures which are fabricated by a silicon-on-insulator...
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