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Unevenly distributed thermal strain, among materials with different coefficients of thermal expansion (CTE) within electronic packages under operation, affects the working performance for the whole unit. The points that experience the highest strain are most likely to be the failure locations. Knowledge of the strain distribution across the package is in great need in order to analyze the failure...
A novel microtribometer based on an in-plane rotational grating displacement sensing mechanism is developed, with which the adhesion force and the coefficients of kinetic friction on the sidewall of as-fabricated MEMS device have been successfully measured.
A novel microtribometer is developed to characterize microelectromechanical systems (MEMS) sidewall friction with high resolution. The design is based on a rotational grating displacement sensing mechanism, with which 1.2-nm sensing sensitivity can be achieved. Employing it, the adhesion force (1.85 ) and the coefficients of static (0.801) and kinetic (0.363) frictions on the sidewall...
MEMS optical scanners are highly desired due to their low-power, high-speed scanning. The in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning minimizes the dynamic deformation, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis and imaging...
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