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A wavelength selective reflector thermally tuned by semiconductor resistors placed in proximity to the microring elements is proposed as a mirror in a hybrid silicon tunable laser application. The Vernier effect is utilized to increase device free spectral range and decrease required temperature shifts.
Random process variations are often composed of location dependent part and distance dependent correlated part. While an accurate extraction of process variation is a prerequisite of both process improvement and circuit performance prediction, it is not an easy task to characterize such complicated spatial random process from a limited number of silicon data. For this purpose, kriging model was introduced...
This paper shows improved phase-noise performance of MEMS oscillators when the sustaining amplifier operates a lateral bulk acoustic wave AlN-on-Si resonator in the nonlinear regime. An empirical exponential-series-based model that closely describes the phase noise in nonlinearity is presented, reflecting the increased resonator filter order and the reduced amplifier flicker-noise contribution. An...
This study designs and fabricates a suspending antenna on silicon substrate with backside electromagnetic band-gap (EBG) structures using surface and bulk micromachining techniques. The proposed Si-based antenna with dimension 7 mm × 18 mm × 0.5 mm only and is constructed of a ground copper plane, supporting copper vias, a suspending F-shape copper conducting layer and backside silicon cavities (to...
We report here on high resonance frequency AFM probes based on MEMS bulk mode resonators. They consist on silicon ring resonators with capacitive transducers vibrating in the in-plane elliptic mode. Nano-tips placed at the maximum of vibration are fabricated in batch process. After electrical and optical characterizations, chips supporting the resonator and the prominent tip are extracted from the...
In this study, for the first time we successfully bonded Si substrates with sputtered Zr-Al-Cu-Ni metallic glassy material. The surface pre-treatment with formic acid vapor plays a remarkable function for oxides removal before bonding. Metallic glasses have fundamentally glassy structure and exhibit a Newtonian viscous flow in the supercooled liquid region. The polymer-like plastic fluidity performs...
The single-shot interferometric imaging of normal mode dynamics in MEMS resonators, oscillating in the radio frequency (rf) regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended silicon and graphene thin-film structures, and their extracted equilibrium profiles, are measured through nondestructive all-optical Fabry-Perot reflectance...
We use the surfactant-modified wet anisotropic etching, a promising micromachining technique we have recently focused on, to fabricate sharp silicon tips with high aspect ratio without additional sharpening by thermal oxidation. Because of the intriguing variation of etching characteristics in surfactant-added solutions as compared to traditional etchants, tips possessing a front angle of about 18°...
A measurement system was newly developed to evaluate the mechanical properties of micro-sized materials at very low temperature ranging from -130°C to room temperature, using liquid nitrogen cooling. In this work, we conducted the fracture toughness tests of single crystal silicon films with thicknesses of about 1 μm at low temperature and found the temperature dependence on the fracture toughness,...
This work demonstrates the application of pulsed-laser processing for sealing release holes in silicon membranes. Holes in the membrane are sealed without deposition, similar to the silicon surface migration sealing process. In contrast to the 1100°C furnace anneal required for the migration process, the pulsed-laser process localizes the heat to the top few microns of the substrate, with the bulk...
Progress in the synthesis and properties of crystalline semiconductor core optical fibers is reviewed. This new class of optical fibers may significantly advance the fields of nonlinear fiber optics and infrared power delivery.
We report on the epitaxial growth, fabrication, and characterization of full-color InGaN/GaN dot-in-a-wire nanoscale LEDs on Si(111), which can exhibit an internal quantum efficiency of ~ 45% and negligible saturation up to ~ 300 A/cm2.
A low power modulator is monolithically integrated with a radiation hardened CMOS driver. This integrated optoelectronic device demonstrates 1.68mW power consumption at 2Gbps.
We report design, fabrication and characterization of microelectromechanical systems (MEMS) enabled mechanically tunable 2D photonic crystal lens. The photonic crystal lens was realized by embedding honeycomb lattice silicon nano rods array inside flexible 10 μm thick SU-8 membrane. A pair of chevron shape nickel actuators was used to symmetrically stretch the 2D photonic crystal lens. The induced...
High-density piezoelectric micromachined ultrasonic transducer (pMUT) arrays have been designed and fabricated using silicon based micromachined process. These devices are based on a novel structure called “reverse-bonding”. Experimental results show that they have excellent performance, suitable resonance frequency and high reliability. The fabricated pMUT arrays are very promising for 3-D medical...
This work demonstrates a technique that allows optical near-field characterization of devices while preserving their optical properties. To do so, a liquid overcladding is introduced to emulate the actual overcladding of the final operational device while allowing the probe to sample the evanescent field at the core cladding interface for analysis by the near-field scanning optical microscopy (NSOM)...
Heterogeneous integration of III-V microlasers on silicon is discussed as a promising scheme for photonic-electronic convergence. The typical performances of an optical interconnect circuit are evaluated and two types of microlasers are proposed and compared.
The wafer direct bonding technology enables one to integrate dissimilar crystals like magneto-optic garnet on Si and III-V semiconductors. Optical nonreciprocal devices are fabricated based on the wafer bonding technology.
We present DWDM nanophotonics architectures based on microring resonator modulators and detectors. We focus on two implementations: an on chip interconnect for multicore processor (Corona) and a network that uses high-radix switches (HyperX). Based on the requirements of these applications we discuss the key constraints on the photonic circuits' devices and fabrication techniques as well as strategies...
Switching fabrics in datacenters that rely on traditional electrical switches face scaling issues in terms of power consumption. Fast optical switches based on silicon photonics platform can enable the high port speed and high interconnection density needed while still maintaining small footprint and low power consumption.
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