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Using plane-view and cross-sectional Raman spectroscopy, polarized infra-red spectroscopy and photothermal spectroscopy, the structure, composition and internal stress of 6H-SiC crystal implanted sequentially with N + and Al + ions to form a (SiC) 1-x (AlN) x solid solution were studied non-destructively and self-consistently. The optimum implantation temperature...
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