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Present work is concentrating on TiO2 thin films doped with Pd, Eu and Pd, Tb and Pd. From comparison of undoped TiO2 with the prepared thin films it has been concluded that doping with Pd gets worse transparency in analysed films and the fundamental absorption edge was shifted to the longer wavelength range. The electrical properties were studied by thermoelectrical measurements. The lowest resistivity,...
Integration of electronics and photonics causes greater requirement for development of electrical and optical activated thin films for a new field of application known as transparent electronics. One of the key materials which is necessary for production of functional elements in transparent electronics devices are transparent oxides semiconductors (TOSs). The TOSs can be applied in many practical...
Summary form only given. Photo-enhanced chemical vapor deposition (PE-CVD) offers the possibility for the lateral integration (i.e., side by side) of different structures (different sequence of layers, materials, thickness and dopants), without the need of any lithography or etching, in a single growth run. In the PE-CVD process, with utilizing the optical near field with nanometric resolution as...
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