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In this study, the nanocomposite Ti-Si-N thin films were prepared by reactive magnetron co-sputtering system. The Ti-Si-N film is a mixed composite consisting of the Ti-Si, Ti-N and Si-N compounds. The TiN phase is polycrystalline while SiNx is amorphous. As Si is added to the Ti-N compound to form Ti-Si-N, the microstructure becomes nanocrystalline grains embedded in an amorphous matrix i.e. nanocomposite...
The hardness of a number of coated systems has been measured using a variety of experimental techniques ranging from traditional macro-Vickers indentation to ultra-low-load depth-sensing nanoindentation. This has allowed the hardness response to be measured over scales ranging from those less than the coating thickness, where a coating-dominated response is expected, to much more macroscopic scales...
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