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The accelerometer based on MEMS is the fast developing device which finds its application in MEMS. It finds its applications in different fields namely automobile, consumer electronics, aeronautical, biomedical and robotics applications. In all these applications the device works based on the principle that the displacement of a small proof mass etched into the silicon surface of the integrated circuit...
This paper presents two high performance wide sensing range MEMS accelerometers, built using different techniques. The paper comprises two sections. In the first section, open-loop accelerometers with up to 40 g sensing range and 18 bit dynamic range are presented. In addition to a discussion on design, statistically based test results are demonstrated. In the second section, a closed-loop sigma-delta...
The present paper investigates the effect of temperature on the charging process in dielectric films of MEMS capacitive switches. The investigation includes the assessment of MIM capacitors and MEMS capacitive switches. The data analysis shows that the dielectric charging is thermally activated and the process can be described by a system with a wide distribution of relaxation times that exhibits...
This paper discusses the design and realization of a micromachined micro Coriolis flow sensor with integrated electrodes for both electrostatic actuation and capacitive readout. The sensor was realized using semicircular channels just beneath the surface of the silicon wafer. The channels have thin silicon nitride walls to minimize the channel mass with respect to the mass of the moving fluid. A comb-shaped...
We present the design, fabrication, and measurement of an RF MEMS switched capacitor with >; 10 W power handling at 10 GHz under hot-switching conditions while maintaining a relatively-low (<; 30 V) pull-in voltage. The device consists of separate RF and DC electrodes, which are defined underneath a temperature-stable circular beam, to result in a large spring constant above the RF electrode...
This paper reports on a continuously tunable MEMS capacitor with a wide tuning range of 5:1, high quality factor of better than 100 (at 1 GHz) at each tuned state, and self-resonance frequency of more than 13.5 GHz. The temperature stability of the capacitance in the temperature range of -50°C to 60°C is better than 7%, which is one of the best reported for continuously tuned capacitors. The maximum...
Long term stability of a DC voltage standard based on a MEMS plate capacitor was investigated. Square wave voltage excitation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle of the apparatus that implements the voltage standard are explained.
Presented in this paper is the experimental quantification of the temperature uncertainty in a MEMS thermally-tunable capacitor that is especially suited for harsh-environment applications. The measured temperature uncertainty is less than 0.64degC at each point tested, and less than 3.10% for the entire operating range. This recorded resolution is limited by the capacitance resolution of the employed...
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