2011 IEEE 24th International Conference on Micro Electro Mechanical Systems > 752 - 755
Source
Abstract
Identifiers
book ISSN : | 1084-6999 |
book ISBN : | 978-1-4244-9632-7 |
book e-ISBN : | 978-1-4244-9634-1 |
DOI | 10.1109/MEMSYS.2011.5734534 |
book ISSN : | 1084-6999 |
book ISBN : | 978-1-4244-9632-7 |
book e-ISBN : | 978-1-4244-9634-1 |
DOI | 10.1109/MEMSYS.2011.5734534 |