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This paper presents yaw and pitch micro-electromechanical system gyroscopes embedding four active nanoelectromechanical (NEMS) piezoresistive gauges each, two of which are used for differential sensing of the Coriolis motion, and two of which are innovatively used to sense the drive motion and thus to close the drive oscillation loop. After presenting the devices design, this paper discusses the advantages...
We present for the first time a new concept for low-cost fabrication of a monolithic 3-axis MEMS compass using integrated permanent magnets and based on a technology compatible with inertial MEMS sensors. Piezoresistive gauges of nanometric scale enable to reduce the sensor size without sensitivity loss. Magnetometers were designed for sensitivities of 9V/T and resolutions less than 10nT/√Hz at a...
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