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The configuration of a novel MEMS interdigital transducer (IDT) dual-axis surface acoustic wave (SAW) gyroscope is presented in this paper. There have been an increasing demand for gyroscopes with small size and low cost in military and commercial systems, however rotator gyroscopes, laser gyroscopes, fiber optic gyroscopes, and silicon-based MEMS gyroscopes can't meet the demand. Although the MEMS...
The configuration of a novel microelectromechanical systems (MEMS) interdigital transducer (IDT) dual axes surface acoustic wave (SAW) gyroscope is presented in this paper. There have been an increasing number of gyroscopes with small size and low cost in military and commercial systems, however rotator gyroscopes, laser gyroscopes, fiber optic gyroscopes, and MEMS gyroscopes can't meet the demand...
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