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SID Symposium Digest of Technical Papers > 55 > S1 > 599 - 601
Advanced Functional Materials > 31 > 47 > n/a - n/a
Przegląd Elektrotechniczny > 2019 > R. 95, nr 10 > 162--165
Science China Materials > 2017 > 60 > 9 > 793-810
Materials Science in Semiconductor Processing > 2017 > 67 > C > 92-97
Materials & Design > 2017 > 127 > C > 126-133
Microelectronic Engineering > 2017 > 168 > C > 15-26
Optics Communications > 2017 > 383 > C > 418-422
Nanoscale Research Letters > 2016 > 11 > 1 > 1-10
Microelectronic Engineering > 2016 > 154 > C > 62-68
Microelectronic Engineering > 2015 > 146 > Complete > 81-84
Microelectronic Engineering > 2015 > 141 > C > 256-260
Microelectronic Engineering > 2015 > 132 > C > 120-134
Microelectronic Engineering > 2015 > 132 > C > 21-34
Optik - International Journal for Light and Electron Optics > 2014 > 125 > 19 > 5853-5860
Microelectronic Engineering > 2014 > 122 > Complete > 9-12