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Well ordered nano sized pore was fabricated on Si substrate using anodic oxidation method. Carbon nanotubes (CNTs) were grown on the well-ordered anodic aluminum oxide (AAO) template formed on Si substrate using plasma enhanced chemical vapor deposition with acetylene (C 2 H 2 ). Without catalytic metal on the bottom of the AAO template, CNTs were grown on the top and within a nano-channel...
In order to improve the selectivity and uniformity of carbon nanotubes (CNTs), we have examined growth of CNTs on a porous alumina template. Well-ordered, nano-sized pores were fabricated on a Si substrate using an anodic oxidation method. CNTs were grown on the well-ordered anodic aluminum oxide template, which was formed on the Si substrate using plasma enhanced chemical vapor deposition with acetylene...
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