Well ordered nano sized pore was fabricated on Si substrate using anodic oxidation method. Carbon nanotubes (CNTs) were grown on the well-ordered anodic aluminum oxide (AAO) template formed on Si substrate using plasma enhanced chemical vapor deposition with acetylene (C 2 H 2 ). Without catalytic metal on the bottom of the AAO template, CNTs were grown on the top and within a nano-channel of the alumina template at 550 o C. The effect of process parameters such as plasma intensity, temperature and gas composition on the morphology of CNTs was investigated.