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A flexible capacitive micromachined ultrasonic transducer (CMUT) array with increased effective capacitance from concave bottom electrodes is proposed for ultrasonic imaging. A CMUT can transmit and receive ultrasound by vibrating its membrane like a drum. DC bias is applied to bring the membrane closer to the bottom electrode for increasing its sensitivity. However, most of the developed CMUTs have...
We report on a novel surface micromachining technology for the fabrication of capacitive absolute pressure sensors. The pressure sensitive membrane is formed by single crystal silicon enabling excellent long term stability. The membrane formation is based on the Advanced Porous Silicon Membrane (APSM) process [1], which is currently applied to piezoresistive transducers. Expanding this technology...
This paper presents a theoretical analysis of charge effects in silicon nitride membranes in Capacitive Micromachined Ultrasonic Transducers (CMUTs) working at 30 MHz in air. The analysis was motivated by observations of drift in the resonance frequency to the CMUTs during electrical and heterodyne interferometric measurements while keeping the DC voltage level constant over time. After applying a...
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