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We report a microelectromechanical systems contour-mode film bulk acoustic resonator (C-FBAR) to monitor in-vitro whole blood coagulation in real time. The C-FBAR has a suspended ring made of piezoelectric aluminum nitride excited in the radial-extensional mode. It operates at its resonant frequency of 150 MHz and possesses a quality factor of 77 in citrated human blood. The C-FBAR is characterized...
We report a MEMS contour-mode film bulk acoustic resonator (C-FBAR) to monitor whole blood coagulation in-vitro in real time. The C-FBAR has a suspended ring of piezoelectric aluminum nitride excited in the radial-extensional mode. It operates at its resonant frequency of 150 MHz and possesses a quality factor (Q) of 140 in water. The C-FBAR is characterized using aqueous glycerine solutions showing...
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