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In this work, Pb(Zr0.53Ti0.47)O3-CoFe2O4 (PZT-CFO) composite films were deposited on platinum silicon substrate using conductive La0.5Sr0.5CoO3 (LCSO) as buffer layers. Both LSCO and PZT-CFO films were prepared via a chemical solution deposited method. The structure and morphology of the composite films were analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM). XRD results show...
0.95Pb(Sc0.5Ta0.5)O3-0.05PbTiO3 (PSTT5) ferroelectric thin films have been prepared by RF magnetron sputtering on LSCO/Pt/Ti/ SiO2/Si(100) substrates. A new two-steps rapid thermal annealing (TSRTA) was developed. TSRTA and conventional rapid thermal annealing (CRTA) were both used to anneal PSTT5 thin films. The XRD patterns shows that the PSTT5 thin films annealed by TSRTA would form pure perovskite...
The processes for the physical vapor deposition (PVD) of Pb(Zr,Ti)O3 (PZT) thin films from two different composite oxide targets has been demonstrated. PZT thin films have been deposited by both PVD or sputter technique and standard sol-gel method. Half micron PZT films were deposited by both methods on identical substrates (Si[(100) 4 inch Cz wafer]/SiO2/Ti-TiO2/Pt) followed by sputter-deposited...
A novel piezoelectric microbalance biosensor based on nano-crystalline PZT/quarts is fabricated. Sol-gel method is utilized to bond the PZT thin films on the quartz substrate as the sensing unit. The microstructure and the surface appearance of PZT thin films on quartz substrate and the influence of cancer cells detecting with the sensing unit using PZT/quartz are studied. The XRD and AFM results...
Ultrasonically assisted hydrothermal synthesis of PZT thin films was performed using an ultrasonic transducer integrated into the lid of an autoclave. Direct ultrasonic irradiation of 23 W at 53 kHz was carried out during the hydrothermal synthesis at a reaction temperature of 140degC for 24 h. The resultant PZT thin film was characterized using scanning electron microscopy (SEM) and X-ray diffraction...
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