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The design of a microactuator serving as an implantable hearing aid to overcome ambylacousia was conducted by executing mechanical and thermal Finite Element Method (FEM) analyses using the ANSYS?? software simulation tool. To do so, the deflection conditions to be fulfilled by the system were determined. The two challenges were to achieve a sufficiently high resonance frequency and to accommodate...
In order to solve the multi-physical field calculating respectively, adding the result simply, and low computational efficiency by finite element method for coupled multi-physics fields analysis in micro-electro-mechanical system, we put forward self organization analysis method in this paper. Using cellular automata as a tool, flat-panel in a typical micro-mechanical as a study object, this study...
This paper presents a thermally actuated resonant microgyroscope fabricated using commercially available standard MEMS process MetalMUMPs. Chevron-shaped thermal actuator is being used to drive the proof mass whereas sensing mechanism of the proposed device is based on the parallel plate sensing electrodes. The proposed model consists of three proof masses coupled with each other to be driven in through...
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