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A method of screen printing carbon nanotubes (CNTs) in a dielectric binder to produce low-cost, large area field emission electron sources is presented. Imaging under the scanning electron microscope (SEM) shows the nanotubes forming dense clusters on the substrate surface with protruding CNTs in random orientations. The printed device gives an emission current of 45 mAcm−2 at an applied field of...
This paper present the preliminary experimental results of carbon nanotube(CNT) cold cathode arrays using thermal chemical vapor deposition (TCVD). The results of the field emission test show that the current density of carbon nanotube arrays can achieve 2.2A/cm2 with a total emission current of 17.2mA.
As the feature size of interconnect technology continues to scale down to nanometer sizes, the state-of-the-art Cu interconnect is expected to run into its physical limit in the near future. Carrier scattering at surfaces and grain boundaries leads to a dramatic increase of Cu resistivity at the nanoscale, resulting increasing resistance capacitance signal delay. The Cu interconnect is becoming more...
Effect of carbon nanotube pillar arrays' edge effect on field emission characteristics is first studied. The ratio of field emission current density at 5.733V/μm is about 55: 6.5: 1 which is nearly proportional to the edge ratio (50:5:1) for small, middle, and large sizes of CNTs' arrays. Besides, ultra low turn-on field (~1.4 V/μm), well emission image uniformity and stability of about ±6.52 % at...
We have succeeded in fabricating ultrafine carbon nanotube (CNT) via interconnects with SiOC interlayer dielectrics. High-quality multiwalled CNTs are grown in via holes with a diameter of 70 nm using pulse-excited remote plasma-enhanced chemical vapor deposition at 450degC. The resistance of a 70-nm-diameter CNT via is 52 Omega, which is the lowest ever reported for CNT via interconnects. The CNT...
Carbon-nanotube (CNT) cathode has promising applications in high-frequency electron and display devices due to its good field-emission performance. The field-emission performance of CNTs with a pulse driving mode is studied both by theoretical analysis and experiments. The impulse responses of a field-emission diode with different external resistance and input voltage are investigated. From the simulations...
The composite structure of silicon tips and vertical aligned carbon nanotubes (CNTs) was prepared using plasma enhanced hot filament chemical vapor deposition (PE-HFCVD) method on the silicon wafer, and Au/Ni film coated on the substrate was considered as a catalyst. High proportion hydrogen of 96% volume percentage and high total pressure are used during preparing process, and the pure CNTs, pure...
This paper addresses the problem of scaling interconnects to nanometric dimensions in future VLSI applications. Traditional copper interconnects are compared to innovative ones made by bundles of metallic carbon nanotubes. A new model is presented to describe propagation along CNT bundles, in the framework of the classical transmission line theory. A possible future scaled CNT bundle microstrip is...
We investigated the effect of titanium (Ti)-coated carbon nanotubes (CNTs) theoretically and experimentally. We found that adsorption of single Ti atom lowers the work function of CNTs by density functional calculations. Also, Ti-coated CNTs showed the largest increase in local density of states around Fermi level under electric fields. Coating of Ti metal on CNTs was carried out by electroless plating...
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