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We present a novel μrespirometer to determine the oxygen consumption rate (OCR) of mammalian cells. The oxygen concentration is measured with the fluorescent dye PtTFPP in a polystyrene-matrix. This film is integrated into a closed microfluidic chip made out of only oxygen-impermeable materials like glass and silicon. This results in a low drift and thus allows long-term measurements with living mammalian...
We present a robust method for measuring the cure shrinkage of dispensable organic films in-situ. Samples consist of dispensed organic material (e.g. die attach or underfill) sandwiched between a glass substrate and a silicon die. A Thermal Mechanical Analyzer (TMA) was used to accurately measure the displacement of the die during cure, and to control the temperature. An analytical model has been...
There is a constant desire to increase substrate size in order to improve cost effectiveness of semiconductor processes. As the wafer diameter has increased from 2” to 12”, the thickness has remained largely the same, resulting in a wafer form factor with inherently low stiffness. Gravity induced deformation becomes important when using traditional metrology tools and mounting strategies to characterize...
In this paper, we propose 3DOF dual-arm microrobots which enabling manipulation and force sensing for a single cell of microorganisms in a microfluidic chip. The untethered microrobots are actuated by permanent magnets which can supply mN order force to stimulate microorganisms and measure the applied force where we want to measure them. The design and fabrication of the untethered microrobots with...
Compact broadband reflectors (BBRs) are of great importance for optoelectronic devices and photonic integrated circuits like lasers, photodetectors, solar cells, and sensors, etc. Traditionally, they can be realized by using metal films or stacked dielectric thin films. Metal films can offer larger reflection bandwidth but are limited by their intrinsic absorption losses. Stacked dielectric thin films...
Crystalline semiconductor nanomembranes (NMs), which are transferable, stackable, bondable and manufacturable, offer unprecedented opportunities for unique and novel device applications. We review here nanophotonic devices based on stacked semiconductor NMs on Si, glass and flexible PET substrates. Photonic crystal Fano resonance-based surface-normal optical filters and broadband reflectors have been...
This study presents a novel and precision process to fabricate an array of micro metal probes. The process includes microlens array mask with the proximity printing in ultraviolet (UV) lithography and Ni electroforming technology. The tip formation of micro cone probe array utilizes the microlens array mask through geometrical optics. Due to the light pass through a microlens, a microlens has a focal...
Studies of tin (Sn) whiskers have emphasized the role of intermetallic compound formation at the tin-substrate interface, which induces a high compressive stress state in the film, thought to be a necessary condition for Sn whisker growth. The goal of this work was to determine if whisker growth is possible from films where intermetallic compounds are largely absent. Thin films (~ 1600 Å) of Sn were...
The anodic bonding technology has been widely utilized in the packaging of the microelectromechanical systems (MEMS), but its relatively high bonding temperature, sometimes relatively weak bonding strength due to micro-bubbles generated along the bonding interface prevent its wider application. In this paper, the studying results demonstrate that can improved bonding strength to carry out the bonding...
A design environment for stripe-shaped PMELA TFTs on glass has been developed and successfully tested. Cell library including standard cells, logic synthesis database, place and route rule, layout parasitic extraction rule and transistor models are developed. Measurement results show that the digital circuits designed in this environment work correctly. They also show that the simulation environment...
In this study, we fabricated in-plane thermoelectric micro-generators (4 mm times 4 mm) based on bismuth telluride thin films by using flash evaporation method. The thermoelectric properties of as-grown thin films are lower than those of bulk materials. Therefore the as-grown thin films were annealed in hydrogen at atmospheric pressure for 1 hour in a temperature range of 200 degC. to 400degC. By...
Nanostructuring is one of the effective approaches to lower the thermal conductivity of materials. Nanostructured skutterudite-related compounds CoSb3, Fe0.5Ni0.5Sb3, Fe0.25Ni0.25Co0.5Sb3 and Te-doped CoSb3 were synthesized by a solvothermal route. The bulk materials were prepared by hot pressing or spark plasma sintering from the solvothermally synthesized nanopowders. The thermal conductivity values...
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