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IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 2 > 178 - 184
Journal of Microelectromechanical Systems > 2008 > 17 > 1 > 4 - 10
IEEE Translation Journal on Magnetics in Japan > 1994 > 9 > 5 > 21 - 26
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 2 > 178 - 184
Journal of Microelectromechanical Systems > 2008 > 17 > 1 > 4 - 10
IEEE Translation Journal on Magnetics in Japan > 1994 > 9 > 5 > 21 - 26