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Point-of-Care (PoC) diagnostic devices, such as lateral flow tests, are often used in low and middle-income countries (LMIC) for low-cost disease detection. Most commercial lateral flow tests use colorimetric detection on a nitrocellulose substrate. In this paper, we present a multistep, fluorescence-based assay detection system, which can detect antibodies in plasma to recombinant protein. Fluorescence-based...
When suspended elastic microstructures are unexpectedly pinned to their underlying substrates, it results in stiction failures. Over the last couple of decades a wide variety of processing, surface and physical schemes such as anti-stiction coatings, supercritical drying and sacrificial supports [1] have been employed to reduce stiction failure rates in MEMS, but most involve expensive machinery or...
The shear strength of a three-dimensional capillary-porous (TCP) Ti coating was investigated as a function of the time of preheating by a plasma jet. The substrates were used after sandblasting with alumina particles and additionally treated with glass beads. Heating the substrate with plasma for 10 seconds minimizes the difference in shear strength for these two substrate treatment options, respectively,...
We have demonstrated an all-solution-processed of flexible piezoelectric nanogenerator based on BaTiO3 and graphene quantum dots (GQDs) with several different concentrations by adding together GQD and PVDF on PET substrate. These devices then have been obtained by spin coating method which able to convert small mechanically wise deformation into electric energy. Even with limited area of active element...
First time arsenic sulfide nanoclusters were prepared by plasma-enhanced chemical vapor deposition. The samples were synthesized via direct interaction of arsenic and sulfur vapors into low-temperature non-equilibrium RF (40 MHz) plasma discharge at reduced pressure. The synthesized nanoclusters were precipitated one a soluble sodium chloride substrate. The dependence of properties of nanoclusters...
Electron mobility of ultra thin body (UTB) GeOI «MOSFETs with body thickness (Tbody) down to 3 nm has been systematically investigated and significant mobility enhancement with decreasing Tbody has been observed for the first time. This channel thickness scaling induced mobility enhancement can be attributed to the unique physical property of ultra thin Ge where the electron effective mass reduces...
The increasing demand for higher performance of ULSI circuits requires aggressive shrinkage of device feature sizes in accordance with Moore's law. Plasma processing plays an important role in achieving fine patterns with anisotropic features in metal-oxide-semiconductor field-effect transistors (MOSFETs). Despite advancements in plasma processing, the degradation of material properties due to plasma...
Ion implantation and plasma etching are essential process steps for manufacturing semiconductor devices. The damage created by those process steps degrades device characteristics and reliability. Therefore, it is necessary to minimize the damage. The damage structure created by ion implantation is reconstructed during an annealing step, and p-n junction is formed as designed in advance. On the other...
This paper presents a research focused on Aerosol Jet printed pads adhesion improvement for electrically conductive adhesives (ECA) testing. The Aerosol Jet technology is able to use nanoparticle inks for deposition process. The adhesion of the ink to the substrate is crucial especially when you realize printing on flexible substrates. The paper will show a new method of adhesion improvement by plasma...
Plasma Dicing uses Deep Reactive Ion Etch (DRIE), also known as The Bosch Process. This is a well-established "front-end" technology, used in silicon MEMS micromachining and via etching in 3D packaging, which is now finding a new home as a dicing technology in the "back-end" of semiconductor processing. This paper will discuss the key issues and integration challenges. This is...
This paper describes for the first time an innovative approach to improve re-distribution layer (RDL) yields in advanced semi-additive processes (SAP). An atmospheric pressure ozone based treatment is proposed as an alternative to oxygen plasma treatment. The ozone treatment process is scalable, being appropriate for process wafers up to large panels, and is suited for small feature sizes down to...
This paper presents the methods of eliminating the plasma-induced Si substrate damage in periphery regions, resulting from high aspect ratio etching process for 3D NAND fabrication. The impact of Si substrate damage is verified by the low and high bias power experiments. The result indicates more Si damage is present with high energy bombardment; therefore, high bias power is recommended to be inhibited...
To establish the non-contact and low cost evaluation of the surface contaminants, an infrared p-polarized multiple-angle incidence resolution spectrometry (p-MAIRS) technique was performed on four kinds of MgO and quartz substrates with different cleanness. The results show that plasma treatment is effective to remove aliphatic contaminants.
This study reports a magnetic-bead based microfluidic system to capture cholangiocarcinoma cells by using structurally well-defined heparan sulfate (HS) octasaccharides. Ten synthetic HS octasaccharides (from SCH-43 to SCH-52) were coated on magnetic beads for this study, respectively. An integrated microfluidic system equipped with micromixers, normally-closed valves, and microchambers was developed...
In this work, nanowire forests are fabricated by using a plasma repolymerization technique. The fabrication process involves only spin-coating of polyimide and plasma bombardment of the polymer, the whole process is lithography-free, micromachining-compatible and extra simple. Besides, the nanowire forests can further be utilized as nanomasks in reactive ion etching for nanopillar-nanowire composite...
A droplet-born air-blowing method is an advanced method of the drawing lithography enables simple and fast fabrication, which does not require UV irradiation or moulding process. However, it has disadvantages such as low throughput in the formation of droplet array as it uses the dispenser to make droplets one by one. To increase the throughput while also simplifying the fabrication method, we suggest...
This work includes design of microwave plasma source, ICP chamber, laser scribing trials, development of the water soluble mask material and DRIE process. Electron cyclotron resonance (ECR) plasma sources are used for a variety of materials processing applications such as semiconductor etching and deposition. ECR sources has several advantages over reactive ion etchers (RIE) commonly used since the...
This study is mainly concerned with the synthesis of bio ceramic composite coating of HA (Hydroxyapatite) reinforced with Aluminium oxide and Iron oxide on SS 316L metallic substrates. These bio composite coatings are obtained by plasma spray technique. The microstructures, phase characterization, hardness and bioactivity of the coatings were investigated. XRD, SEM and EDS were used to examine the...
Thickness of the TBC is a few hundred microns and is applied to protect against oxidation, hot corrosion and wear. Thin films coating of yttria stabilized zirconia (YSZ) have been coated on cast iron substrates. The morphology, structure properties were studied by scanning electron microscopy (SEM), X-ray diffraction (XRD).
In this work we report on the fabrication and testing of an impedance biosensor consisting of an array of gold-copper (AuCu) microelectrodes on a glass substrate. The sensor was manufactured by means of a combination of microfabrication techniques and the complete protocol is detailed within this paper. The measurement system consisted of a function generator, a lock-in amplifier and a custom-made...
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