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Wafer stage control system of step-scan lithography is a typical dual-stage system. Fine actuator ensures the high tracking precision and coarse actuator makes large-stroke movement to keep the fine actuator is not closed to saturation. PQ method is an effective technique for transforming a DISO system to two SISO systems. Two correlative controllers are designed for the parallel SISO systems which...
In this paper, robust controllers have been proposed for oscillation suppression in the RTAC benchmark problem. A nominal plant and an uncertainty model are extracted out of varieties of linear models, identified for the nonlinear system and the generalized plant for the unstructured uncertainty problem has been presented. Based on passivity, a cascade controller has been designed to reduce amount...
In this paper, robust controllers have been proposed for oscillation suppression in the RTAC benchmark problem. A nominal plant and an uncertainty model are extracted out of varieties of linear models, identified for the nonlinear system and the generalized plant for the unstructured uncertainty problem has been presented. Based on passivity, a cascade controller has been designed to reduce amount...
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