The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited thermal sensors for infrared imaging and biochemical sensing applications. An integrated quartz sensor array using CMOS-compatible micromachining techniques has been designed...
We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35 μm CMOS. The accelerometer is based on thermal convection where a central heater creates a hot gas bubble. Acceleration applied to the body will change the temperature distribution on the device, the latter being measured by four detectors containing six serially connected thermocouples. The paper will present...
In this paper, a monolithic integrated piezoresistive flow sensor is presented, which was fabricated with an intermediate CMOS MEMS process compatible with pressure sensors. Four symmetrically arranged silicon diaphragms with piezoresistors on them are used to sense the drag force induced by the input gas flow. Signal conditioning CMOS circuit with temperature compensation was designed and tested,...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.